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Medical ultrasound and other devices that require transducer arrays are difficult to manufacture, particularly for high frequency devices (>30 MHz). To enable focusing and beam steering, it is necessary to reduce the center-to-center element spacing to half of the acoustic wavelength. Conventional methodologies prevent co-sintering ceramic–polymer composites due to the low decomposition temperatures of the polymer. Moreover, for ultrasound transducer arrays exceeding 30 MHz, methods such as dice-and-fill cannot provide the dimensional tolerances required. Other techniques in which the ceramic is formed in the green state often fail to retain the required dimensions without distortion on firing the ceramic. This paper explores the use of the cold sintering process to produce dense lead zirconate titanate (PZT) ceramics for application in high frequency transducer arrays. PZT–polymer 2-2 composites were fabricated by cold sintering tape cast PZT with Pb nitrate as a sintering aid and ZnO as the sacrificial layer. PZT beams of 35 μm width with ~5.4 μm kerfs were produced by this technique. The ZnO sacrificial layer was also found to serve as a liquid phase sintering aid that led to grain growth in adjacent PZT. This composite produced resonance frequencies of >17 MHz. 

Abstract Ceramics such as lead zirconate titanate (PZT) tend to dissolve incongruently, and thus pose a challenge in the cold sintering process. Moist lead nitrate has previously been shown to enable a cold sinter‐assisted densification of PZT by a viscous phase sintering mechanism. In this paper, lead acetate trihydrate is demonstrated to lower the required temperature of the cold sintering step to 200°C. This densification process was described as a two‐step process: cold sintering of PZT with lead acetate trihydrate and post‐annealing the as‐cold sintered PZT ceramics. Unlike in the case of lead nitrate, PZT densification with lead acetate trihydrate occurs by a liquid phase assisted sintering mechanism, leading to an as‐cold sintered relative density of 84% at 200°C. After performing a post‐anneal step at 900°C, >97% relative densities were achieved in samples that were cold sintered with lead acetate trihydrate. This step not only densified PZT but also refined the grain boundaries. In the post‐annealed samples, the room‐temperature relative permittivity at 100 Hz was ~1600, slightly higher than that reported in samples that used lead nitrate as a sintering aid; the loss tangent was about 3.8%. For measurements at 10 Hz, the remanent polarization in both cases was ~28 µC/cm². Both Rayleigh analysis and aging studies showed that a higher irreversible contribution to the permittivity exists in samples that used lead nitrate as a cold sintering aid.